Products
Safeguard-RHICS Reticle Handling, Inspection, and Cleaning System

The Safeguard-RHICS Reticle Handling, Inspection, and Cleaning System is the next generation in automated reticle handling, inspection, and cleaning of reticles up to 230 mm (9") square. The Safeguard-RHICS provides improved stepper utilization and reduced lithography rework as a result of defect-free reticles.

The Safeguard-RHICS’s unique design meets the high demand of today's lithography and mask house requirements. This tool includes Optional Pellicle Removal System and automated pellicle mounter.

Features
  • Configurations with up to 4 BOLTS Interface compliant Load Ports.
  • SEMI compliant Load Ports.
  • OHT compliant interface.
  • ISO Class 3 or better operating environment.
  • Intuitive software interface for fast and reliable sorting.
  • Recipe driven sorting routines.
  • HMI featuring 15” LCD panel computer with touch screen.
  • Small footprint.
  • Supports multiple reticle pods such as 200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML.
  • SEMI S2 and S8 Compliant.
Supported Cassette Types
  • 150mm Reticle SMIF POD.
  • 200mm Reticle SMIF Pod.
  • HOYA Reticle Shipping Box.
  • Clamshell Shipping Box.
  • Canon Stepper Box.
  • Nikon Stepper Box.
  • ASML Stepper Box.
  • Toppan Shipping Box.
Options
  • 1µm,10µm or greater automated particle detection system.
  • Optional Pellicle removal system and automated pellicle mounter.
  • Bright Light Inspection System.
  • N2 Particle Removal System with in-line 0.03µm particle filtration and ionization.
  • Pre-aligner.
  • Temperature Control: ±0.02°C.
  • Humidity Control: ±0.1% RH (Relative Humidity).
  • Integrated AMC Chemical Filtration.
Safeguard-BRS Bare Reticle Stocker
The Safeguard-BRS Bare Reticle Stocker meets high demand of today's lithography and mask house requirements by proving:
  • ISO Class 3 or better storage environment.
  • Advanced reticle handling robotics.
  • Complete isolated storage environment.
  • Vertical storage carousel.
  • High Storage capacity (3000 reticles).
  • Higher availability and throughput (4ports).
  • Supports multiple reticle pods such (200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML).
  • OHT compliant interface.
  • Optional Temperature control: ±0.01°C.
  • Optional Humidity Control: ±0.1% RH (Relative Humidity).
  • Optional Integrated AMC Chemical Filtration
  • SEMI E-78 compliance
Complete Reticle Protection

The Seminet introduces an innovative concept for storage of reticles within an automated reticle stocker: the vertical carousel. The vertical carousel completely isolates reticles from the surrounding environment . All moving parts are isolated outside the vertical carousel eliminating any service-related entry into the reticle storage area. Reticles are protected from ESD induced damage using ionizers.

Safeguard-RTS Reticle Transfer System

The Safeguard-RTS Reticle Transfer System is designed to be a seamless interface to photolithography, metrology, or cleaning process of equipment. The tool is a high throughput ultra clean transfer system. Its compact footprint enables the Safeguard-RTS to be integrated with new equipment or field retrofit table to already installed equipment in semiconductor fabs and mask houses.

Features
  • SEMI E15.1 BOLTS Interface.
  • Compliant Load Port.
  • OHT complaint interface.
  • HMI featuring 15" LCD panel computer with touch screen.
  • Advanced reticle handling robotics with edge grip end-effector.
  • Smallest footprint in the market.
  • SEMI S2 and S8 complient.
Supported Cassette Types
  • 150mm Reticle SMIF POD.
  • 200mm Reticle SMIF Pod.
  • HOYA Reticle Shipping Box.
  • Clamshell Shipping Box.
  • Canon Stepper Box.
  • Nikon Stepper Box.
  • ASML Stepper Box.
  • Toppan Shipping Box.
Options
  • Bright Light Inspection System which includes optics and high intensity light source.
  • N2 Particle removal system with in-line 0.03µm particle filtration and ionization.
  • Pre-aligner with integrated reticle/pellicle ID.
  • Temperature control: ±0.02°C.
  • Humidity Control: ±0.1% RH (Relative Humidity).
  • Integrated AMC Chemical Filtration.
Safeguard-RSS Reticle Sorter System

The Safeguard-RS is a high throughput ultra clean sorter system with an intuitive software interface making the sorting of reticle quick and easy.The Safeguard-RS Ranges from 1-4 Load port configurations and its modular design can be customized to fit your system requirements. The Safeguard-RS can be configured to sort between the following cassettes:

Features
  • ISO Class 3 or better storage environment.
  • Intuitive software interface for fast and reliable sorting.
  • Recipe driven sorting routines.
  • Advanced reticle handling robotics with edge grip end-effector.
  • Smallest footprint in the market.
  • SEMI compliant load ports.
  • Supports multiple reticle pods such as 200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML.
  • S2 and S8 Compliant.
Supported Cassette Types
  • 150mm Reticle SMIF POD.
  • 200mm Reticle SMIF Pod.
  • HOYA Reticle Shipping Box.
  • Clamshell Shipping Box.
  • Canon Stepper Box.
  • Nikon Stepper Box.
  • ASML Stepper Box.
  • Toppan Shipping Box.
Options
  • 10µm or greater automated particle detection system.
  • 1µm or greater automated particle detection system.
  • Bright Light Inspection System which includes optics and high intensity light source.
  • N2 Particle Removal System with in line 0.03µm particle filtration and ionization.
  • Optional Pre-aligner with integrated reticle/pellicle ID.
  • Optional Temperature Control: ±0.01°C.
  • Optional Humidity Control: ±0.1% RH (Relative Humidity).
  • Optional Integrated AMC Chemical Filtration.
Safeguard-RIS Reticle Inspection System

The Safeguard-RIS Reticle Inspection System is a high throughput automated reticle inspection system for 150mm reticles capable of detecting 0.1µm particles. The fully automated system prevents mask and pellicle damage from mishandling normally encountered in manual inspection processes.

The Safeguard-RIS allows masks to be routinely re-qualified by performing an inspection prior to its use thus improving stepper utilization and reducing lithography rework.

Features
  • ISO Class 2 or better min-environment with 100% ULPA filter coverage.
  • Advanced reticle handling robotics with edge grip end-effector.
  • Available Inspection levels of 0.1µm, 1µm or 10µm particle sizes.
  • N2 Blow-Off for particle removal with in line 0.03µm particle filtration.
  • Smallest footprint.
  • SEMI load ports for 200mm SMIF, 150mm SMIF, Canon, Nikon, ASML.
  • RFID Read/Write for SMIF load ports.
  • SEMI standard GUI with touch screen, keyboard, and 3D mouse.
  • Pre-programmed recipes for all functions and user created recipes.
  • SEMI standard GUI with touch screen, keyboard, and 3D mouse.
  • Size and location of particles are displayed in a defect map.
  • Defect table and defect size histogram are also displayed.
  • Defect data is stored in an on-board database.
  • SEMI S2, S8, F47 and CE compliant (certification upon request).
  • SECS/GEM compliant for Host communications.
Optional Features
  • Reticle Pre-aligner with integrated reticle/pellicle ID.
  • Environmental control: Temp ±0.05°C.
  • Humidity: ±0.5% RH, AMC Chemical Filtration.
  • N2 Purged Environment for Low O2 or Low Humidity requirements (<100ppm).
  • Automated Pellicle Mounting or Removal.
  • BLIS (Bright Light Inspection System) for manual inspection.
Safeguard-BLIS Bright Light Inspection System

The Safeguard-BLIS Bright Light Inspection System is the next generation in particle inspection and nitrogen cleaning system for reticles up to 230 mm(9") squares. Utilizing a Bright Light Inspection which Safeguard-BLIS allows the operator to visually see any defects or particles deposited on the surface of reticle ensuring a clean process.

Features
  • ISO Class 3 or better storage environment.
  • Advanced reticle handling robotics with edge grip end-effector.
  • N2 Particle Removal System with in line 0.03µm particle filtration and ionization.
  • Small footprint .
  • SEMI compliant load ports.
  • Supports multiple reticle pods such as 200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML.
  • Optional Pre-aligner with integrated reticle/pellicle ID.
  • Optional 10µm or greater automatic particle inspection system.
  • Optional Pellicle Removal System.
  • Optional Pellicle Mounting System.
  • Optional Temperature Control: ±0.01°C.
  • Optional Humidity Control: ±0.1% RH (Relative Humidity).
  • Optional Integrated AMC Chemical Filtration.
Safeguard-PRS Pellicle Removal System

The pellicle removal system removes pellicles of all shapes and sizes from reticles up to 9” square while leaving the adhesive membrane in tact. By removing the pellicle with the adhesive membrane this greatly reduces the time spent during the cleaning process.

Features
  • Fast and accurate pellicle removal.
  • Hands free operation.
  • Reduced cleaning cycles.
  • Removes pellicle with adhesive membrane in tact.
  • Removes pellicles of all shapes and sizes.
  • Fully automated solution.
Safeguard-PMS Pellicle Mounting System

The Pellicle Mounting System (PMS) can be integrated into any one of the safeguard reticle handling systems to provide complete control over the mounting process. Fully automated and intelligent, PMS ensures that the correct, defect-free pellicle is accurately mounted to the reticle.

Features
  • Fast and accurate pellical mounting.
  • Compatible with reticles up to 230 mm( 9" ) square.
  • Hands free operation.
  • Integrated pellicle library.
  • Pellicle inspection pre-mount.
  • ESD control.
  • Mounts pellicles of all shapes and sizes.
  • Fully automated and intelligent solution.