Products

EFEM

Matrix-EFEM

Matrix-EFEM (Environmental Front End-Module) is designed to be integrated into any semiconductor process tool for front-end or back-end applications.

Features
  • Can handle 300mm, 200mm, 150mm, and reticles.
  • Matrix Ranges from 1-4 Load port configurations.
  • Modular design.
  • Can be interfaced with Seminet’s complete line of wafer and reticle handling equipment:
    Single or dual arm robots.
    Pre-aligners.
    FOUP or SMIF openers.
    FOSB openers.
    Reticle cassettes.
    Single or dual arm robots.

EFEM

Enigma Tool Buffer

The Enigma™ is the next generation in 300mm FOUP and 200MM Buffers.

Features of Enigma™-300
  • Fully Automatic.
  • High density storage capacity.
  • Advanced storage management software.
  • Smallest footprint.
  • Motion Control.
  • Highly advanced and reliable robotics solution.
  • Up to 16 FOUP or SMIF storage capacity.
  • Integrated System controller with single line Ethernet communication.
  • I/O Load Port Capable of interfacing with AGV, PGV, and OHT systems.
  • S2 and S8 Compliant.

Load Ports

200mm SMIF

The ExpressLoad-200™ is an advanced load port for 200mm wafer SMIF carriers. Designed to meet SEMI standards, ExpressLoad-200™ features the cleanest and most reliable SMIF interface solution for your process requirements.

Integrated with state-of-the art wafer mapping the ExpressLoad-200 is capable of detecting crossed slotted, double, or missing wafers in the SMIF cassette prior to processing. With a Single line Ethernet communication and advanced UI the ExpressLoad-200 is easily integrated into your process tool.

Features
  • SEMI Standard Bolts Interface.
  • Kinematics couplings for accurate alignments.
  • Minimized particle generation.
  • N2 Purge Port for purging the SMIF pod (option).
  • S2 and S8 Compliant.
  • E64 Cart Docking Interface.
  • E15.1 Bolts Interface.

Load Ports

200mm SMIF open cassette

The ExpressLoad-200™ is an advanced load port for 200mm wafer SMIF carriers. Designed to meet SEMI standards, the ExpressLoad-200™ features the cleanest and most reliable SMIF interface solution for your process requirements. Integrated with state-of-the art wafer mapping the ExpressLoad-200 is capable of detecting crossed slotted, double, or missing wafers in the SMIF cassette prior to processing. With a Single line Ether net communication and advanced UI the ExpressLoad-200 is easily integrated into your process tool.

Features
  • SEMI Standard Bolts Interface.
  • Kinematics couplings for accurate alignments.
  • Minimized particle generation.
  • N2 Purge Port for purging the SMIF pod (option).
  • S2 and S8 Compliant.
  • E64 Cart Docking Interface.
  • E15.1 Bolts Interface.