Products
Atmospheric Mini-Environment

Seminet is the leader in the design and development of precision atmospheric Mini-Environment for the semiconductor industry. Seminet works with OEM's and End-users to customize the Mini-environment to meet cutomer requirements and dimensions.

The Mini-Environment features integrated Fan Filter Units (FFU) with adjustable speed controls to accurately adjust the pressure and laminar flow. Our Mini-Environments provide the most reliable and cost effective solution for your process needs.

Features
  • ISO Class 3 or better Filtration.
  • Integrated Fan Filter Units with adjustable speed control.
  • Integrated AMC Chemical Filtration.
  • Integrated Temperature/Humidity Control.
  • Stainless steel frame and panels.
  • Integrated ionization system.
  • SEMI E-78 compliance.
Applications
  • Photolithography tools.
  • Wet process cleaning.
  • Metrology tools.
  • CMP tools.
  • PhotoMask tools.
  • Laser MEMS.
E-beam Enclosure

E-Beam (Electron beam) lithography is today's standard technology for application in the world of nanotechnology. For this process to be successful, the highest level of temperature, humidity, EMI and vibration control has to be achieved.

Seminet is the leader in the design and development of custom E-beam enclosures for the semiconductor industry. Seminet Automation provides a complete solution for your E-beam requirements which includes the following:

Precision Air Handling:

The EVAC Air handling system (Environmental Air Control) is engineered to supply the E-beam enclosure with remote precision controlled temperature/humidity air supply. The EVAC can be integrated with AMC chemical filtration to filter any harmful chemicals from the ambient environment.

Air Handling Features include:
  • Temperature control: ±0.01°C.
  • Humidity Control: ±0.1% RH (Relative Humidity).
  • Single or multiple outputs.
  • 100-12,000 CMF output solutions.
  • EMI Reduction: Less the 0.1MG.
Environmental Monitoring

The Environment Monitoring System provides continuous monitoring and control of factors that may affect your Environments.

Following sensors are integrated into the mini-environment:

  • Particle counters.
  • Temperature and relative humidity.
  • Differential pressure.
  • Air velocity.
  • Electrostatic charge.
  • Electrostatic discharge event detection.
  • Dynamic FFU (Fan Filter Unit) control.
Features
  • Differential Pressure: 0 - 0.25 inch of H2O positive static pressure.
  • Particle Count: 0.3 micron at 0.1 cfm (2.83lpm).
  • Air Velocity: 0-100FPM with an accuracy of 2.5%.
  • ESD Event Sensor: Continuous real time monitoring of ESD Events.
  • Temperature/Humidity Sensor: Temperature/Humidity measurement of mini-environment.
  • Power Requirements: 24VDC .
  • Communications: 100base T Ethernet port and dual RS485 ports.
Air Handling System

Seminet provides a complete line of precision temperature and humidity control air handling systems. The EVAC Air handling system (Environmental Air Control) is engineered to supply your process tool with single or multiple outputs for your process requirements. The EVAC can be integrated with AMC(?) chemical filtration to provide a source for clean air in a compact footprint for your process needs.

Features
  • Temperature control: ±0.01°C.
  • Humidity Control: ±0.1% RH (Relative Humidity).
  • Output: Single or multiple outputs; 100-12,000 CMF output solutions.
  • Filtration: Integrated AMC Chemical Filtration.
  • Space Optimization.
  • Cost Effective Air Handling Solution.
N2 Purged Mini-Environment with EFEM

Seminet Automation is the leader in the design and development of precision N2 Purged Mini-Environments for the semiconductor industry. The N2 Purged Mini-Environment features an advanced N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment and provide dew point control down to -55dp.

The N2 Purged Mini-Environment with EFEM provides the additional feature of a 200mm SMIF Load Port for fully automated reticle handling. Custom designed to meet your requirements and available with precision temperature control, our N2 Mini-Environments provide the most reliable and cost effective solution for your process needs.

Features
  • Advanced re-circulating N2 adaptive control solution.
  • ISO Class 3 or better Filtration.
  • Integrated Fan Filter Units with adjustable speed control.
  • Integrated Temperature Control.
  • Stainless steel frame and panels.
  • Dew point control down to -55dp.
  • Fully automated reticle handling.
  • 200mm SMIF Load Port.
N2 Purged Environments

Seminet Automation is the leader in the design and development of precision N2 Purged Mini-Environments for the semiconductor industry. The N2 Purged Mini-Environment features an advanced N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment and provide dew point control down to -55dp.

The N2 Purged Mini-Environment with EFEM provides the additional feature of a 200mm SMIF Load Port for fully automated reticle handling. Custom designed to meet your requirements and available with precision temperature control, our N2 Mini-Environments provide the most reliable and cost effective solution for your process needs.

Features
  • Advanced recirculating N2 adaptive control solution .
  • ISO Class 3 or better Filtration.
  • Integrated Fan Filter Units with adjustable speed control.
  • Integrated Temperature Control.
  • Stainless steel frame and panels.
  • Dew point control down to -55.